AUTHORS: Reshmi Maity, Santanu Maity, Niladri Pratap Maity
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ABSTRACT: In this paper a rectangular silicon nitride membrane capacitive micromachined ultrasonic transducer (CMUT) has been proposed to suit best for medical imaging applications. Investigations have been brought up using single cell rectangular architecture as well as array of the cells through three dimensional finite element method (FEM) model. The maximum and minimum displacements result with single cell and array of cells have been measured. The force is evaluated as 16.894 µN. The relative investigation of membrane displacements of array rectangular geometries on a lone substrate accumulated with dissimilar distances (1 μm, 2 μm, 5 μm, and 8 μm) between each other is also carried out.
KEYWORDS: Sensor, CMUT, Ultrasonic, Medical Imaging, FEM, MEMS
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